Articles you may be interested inEtching selectivity of indium tin oxide to photoresist in high density chlorine-and ethylene-containing plasmas J. Vac. Sci. Technol. B 31, 021210 (2013); 10.1116/1.4795209 Efficient and reliable green organic light-emitting diodes with Cl2 plasma-etched indium tin oxide anode

Indium tin oxide (ITO) thin films doped with Au, Ni, or Pt (3.5 at.% to 10.5 at.%) were deposited on p-GaN epilayers (Mg $4 9 10 19 cm À3 ) using direct-current (DC) sputter codeposition. It was found that undoped ITO contacts to p-GaN exhibited leaky Schottky behavior, whereas the incorporation of a small amount of Au (3.5 at.% to 10.5 at.%) significantly improved their ohmic characteristics. Compared with standard Ni/ITO contacts, the Au-doped ITO contacts had a similar specific contact resistance in the low 10 À2 X cm À2 range, but were more stable above 600°C and more transparent at blue wavelengths. These results provide support for the use of Au-doped ITO ohmic contact to p-type GaN in high-brightness blue light-emitting diodes.

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Combining optics and microfluidics to create a portable optofluidic photonic crystal (PhC) biosensor is an approach with promising applications in the fields of counter-terrorism, agricultural sciences, and health sciences. Presented here are fabrication processes of a gallium nitride (GaN)-based PhC biosensor with a resonance-enhanced fluorescence detection mechanism that shows potential for meeting the single molecule detection requirements of these application areas. GaN is being targeted as the photonic crystal slab material for two main reasons: its transparency in the visible spectral range, within which the excitation and emission wavelengths of the commercial fluorescent-labeling dyes fall, and its intrinsic thermal stability which provides an increased flexibility of operating in different environments. Optical modeling efforts indicate a 25-fold enhancement of the fluorescent emission in this portable fluorescentbased PhC biosensor.