Raman scattering from arrays of GaAs quantum cylinders with radii down to 30 nm has been observed. The spectra show an enhanced TO phonon intensity due to a change in the first-order selection rules. In addition, the smallest cylinders exhibit an extra spectral feature between the TO and LO phonons. The behaviour of this additional peak as a function of the scattering geometry, the cylinder size and the variation of the medium surrounding the cylinders is consistent with a theoretical model of the surface phonons of a cylinder.

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Selective reactive ion etching of InGaAs and InP over InAlAs in SiCl4/SiF4/HBr plasmas J. Vac. Sci. Technol. B 13, 2344 (1995); 10.1116/1.588071 New chemistry for selective reactive ion etching of InGaAs and InP over InAlAs in SiCl4/SiF4/HBr plasmas Appl. Selective dry etching of InGaAs and InP over AlInAs in CH4/H2/SF6 Appl.

We report photoluminescence measurements made on free-standing, lattice-matched GaAs/AlGaAs and pseudomorphic InGaAs/GaAs quantum boxes fabricated by laterally patterning quantum wells using electron-beam lithography and either reactive ion etching or ion beam milling. At temperatures below 10–20 K the luminescence efficiency of most of the GaAs quantum-box arrays tends to scale with the volume of quantum-well material remaining after processing even for the smallest boxes which have lateral dimensions of only 40–50 nm. These observations indicate that the surface recombination rate in GaAs submicron structures can be small relative to the radiative recombination rate at low temperatures. In contrast, radiative recombination in the InGaAs/GaAs quantum boxes is strongly quenched for lateral dimensions less than 500 nm. We suggest that this is because photoexcited carriers are laterally localized in the GaAs boxes by potentials of the order of a few meV, possibly associated with interface disorder or strain relaxation, and that such localization effects are smaller in the InGaAs boxes.

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