Here, we developed highly sensitive piezoelectric sensors in which flexible membrane components were harmoniously integrated. An electrospun nanofiber mat of poly(vinylidenefluoride-co-trifluoroethylene) was sandwiched between two elastomer sheets with sputtered electrodes as an active layer for piezoelectricity. The developed sensory system was ultrasensitive in response to various microscale mechanical stimuli and able to perceive the corresponding deformation at a resolution of 1 μm. Owing to the highly flexible and resilient properties of the components, the durability of the device was sufficiently stable so that the measuring performance could still be effective under harsh conditions of repetitive stretching and folding. When employing spin-coated thin elastomer films, the thickness of the entire sandwich architecture could be less than 100 μm, thereby achieving sufficient compliance of mechanical deformation to accommodate artery-skin motion of the heart pulse. These skin-attachable film- or sheet-type mechanical sensors with high flexibility are expected to enable various applications in the field of wearable devices, medical monitoring systems, and electronic skin.

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