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In this paper, we study row-based detailed placement refinement for triple patterning lithography (TPL), which asks to find a refined detailed placement solution as well as a valid TPL layout decomposition under the objective of minimizing the number of stitches and the half-perimeter wirelength. Our problem does not have precoloring solutions of cells as the input, and it allows using techniques, including white space insertion, cell flipping, adjacent-cell swapping, and vertical cell movement, to optimize the solution quality. We first present (resource-constrained) shortest-path-based algorithms for several TPL-aware single-row placement problems that allow or disallow perturbing a given cell ordering. Based on these algorithms, we then propose an approach to our TPL-aware detailed placement refinement problem, which first minimizes the number of stitches and then minimizes the wirelength. Finally, we report extensive experimental results to demonstrate the effectiveness and efficiency of our approach.Index Terms-Detailed placement refinement, layout decomposition, triple patterning lithography (TPL).

The textile industry, which produces toxic and low biodegradable wastewater, is a major industry of Taiwan. Thus, this study compared the performance of the membrane bioreactor (MBR) and sequencing batch reactor (SBR) process for treating real textile dyeing wastewater. The microbial diversity of the MBR process was also identified by a combined culturing method and molecular biotechnology. The results show that the removal efficiencies for color, COD, BOD, and SS with the MBR process were 54, 79, 99, and 100%, respectively, all higher than the corresponding parameters for the SBR process: 51, 70, 96, and 60%. All the above four parameters for the MBR effluent meet the criteria of the Taiwan EPA, while on the other hand for the SBR process, only color and COD meet the Taiwan EPA effluent criteria. Furthermore, the genus Microbacterium, especially the Microbacterium aurum, was the most predominant population, contributing 70.6% of the total isolates, and might be responsible for the degradation of the dyeing wastewater. Another two textile dyeing degradation bacteria, Paenibacillus azoreducens and Bacillus sp., as predominant bacteria in MBR sludge, were also observed.

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