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Scanning tunneling microscopy (STM) and reflection high-energy electron diffraction (RHEED) experiments were performed to study growth modes induced by hyperthermal Ge + ion action during molecular beam epitaxy (MBE) of Ge on Si(100). The continuous and pulsed ion beams were used. These studies have shown that ion-beam bombardment during heteroepitaxy leads to decrease in critical film thickness for transition from twodimensional (2D) to three-dimensional (3D) growth modes, enhancement of 3D island density and narrowing of island size distribution, as compared with conventional MBE experiments. The crystal perfection of Ge/Si structures with Ge islands embedded in Si was analyzed by Rutherford backscattering/channeling technique (RBS) and transmission electron microscopy (TEM). The results of Kinetic Monte Carlo (KMC) simulation have shown that two mechanisms of ion beam action can be responsible for stimulation of 2D-3D transition. They are: (1) surface defect generation by ion impacts and (2) enhancement of surface diffusion.

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