This paper demonstrates the fabrication, characterization, and experimental imaging results of a 62+62 element λ/2-pitch row-column-addressed capacitive micromachined ultrasonic transducer (CMUT) array with integrated apodization. A new fabrication process was used to manufacture a 26.3 mm by 26.3 mm array using five lithography steps. The array includes an integrated apodization, presented in detail in Part I of this paper, which is designed to reduce the amplitude of the ghost echoes that are otherwise prominent for row-column-addressed arrays. Custom front-end electronics were produced with the capability of transmitting and receiving on all elements, and the option of disabling the integrated apodization. The center frequency and -6-dB fractional bandwidth of the array elements were 2.77 ± 0.26 MHz and 102 ± 10%, respectively. The surface transmit pressure at 2.5 MHz was 590 ± 73 kPa, and the sensitivity was 0.299 ± 0.090 V/Pa. The nearest neighbor crosstalk level was -23.9 ± 3.7 dB, while the transmit-to-receive-elements crosstalk level was -40.2 ± 3.5 dB. Imaging of a 0.3-mm-diameter steel wire using synthetic transmit focusing with 62 single-element emissions demonstrated axial and lateral FWHMs of 0.71 mm and 1.79 mm (f-number: 1.4), respectively, compared with simulated axial and lateral FWHMs of 0.69 mm and 1.76 mm. The dominant ghost echo was reduced by 15.8 dB in measurements using the integrated apodization compared with the disabled configuration. The effect was reproduced in simulations, showing a ghost echo reduction of 18.9 dB.

This paper presents the characterization of two prototyped fully integrated 62+62 row-column-addressed (RCA) 2-D transducer array probes, which are based on capacitive micromachined ultrasonic transducer (CMUT) and on piezoelectric transducer (PZT) technology, respectively. Both transducers have integrated apodization to reduce ghost echoes and were designed with similar acoustical features i.e. 3 MHz center frequency, λ /2-pitch and 24.8 × 24.8 mm 2 active footprint. The transducer arrays were assembled in a 3-D printed probe handle with electromagnetic shield and integrated electronics for driving the 128-channel coaxial cable to the scanner. The electronics were designed to allow all elements, both rows and columns, to be used interchangeably as either transmitters or receivers. The transducer characterization i.e. bandwidth, phase delay, surface pressure, sensitivity, insertion loss, and acoustical crosstalk, were based on several single element measurements, including pressure and pulse-echo, and were evaluated quantitatively and comparatively. The weighted center frequency was 3.0 MHz for both probes and the measured −6 dB fractional bandwidth was 109 ± 4% and 80 ± 3% for the CMUT and the PZT probe, respectively. The surface pressures of the CMUT and PZT were 0.55 ± 0.06 MPa and 1.68 ± 0.09 MPa, respectively, and the receive sensitivities of the rows (receiving elements) were 12.9 ± 0.7 µV/Pa and 13.7 ± 2.1 µV/Pa.

Abstract-A 3 MHz, λ/2-pitch 62+62 channel row-column addressed 2-D CMUT array designed to be mounted in a probe handle and connected to a commercial BK Medical scanner for real-time volumetric imaging is presented. It is mounted and wire-bonded on a flexible PCB, which is connected to two rigid PCBs with pre-amplifiers for driving the cable to the scanner. The array and PCBs are encapsulated in a 3-D printed handle, and a grounded shielding layer and silicone coating is applied to the front-side of the array for physical and electrical isolation. The handle is assembled together with a 192-channel coaxial cable that connects it to the ultrasound scanner, which supplies the probe with a 190 V DC bias voltage and up to ±75 V AC excitation voltage. The probe was successfully connected to a BK3000 scanner and used as two decoupled 1-D phased arrays. Volumetric imaging was demonstrated using the experimental SARUS scanner with 132 volumes/sec.

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Abstract-The harmonic imaging mode is today a fundamental part of ultrasound imaging; it is not only used for suppressing the grating lobe artifact, but also to reduce many other acoustical artifacts in the ultrasound image. A vital performance parameter for accepting CMUT probes as a clinical usable transducer technology is, that it can support harmonic imaging. The large bandwidth of the CMUT is a clear advantage for harmonic imaging, but the inherent nonlinear behavior of the CMUT poses an issue as it is difficult to dissociate the harmonics generated in the tissue from the harmonic content of the transmitted signal. This work presents how proper pulse coding of a bipolar pulser, which is present in most commercial ultrasound scanners, can reduce the intrinsic generated harmonic to fundamental pressure amplitude ratio to below −35 dB, making CMUT probes usable for clinical applications.