A generalized Gaussian function was used to accurately model the refractive-index profile of planar optical waveguides ill z-cut LiNbO3 fabricated by the annealed proton-exchange technique. The computed waveguide parameters were empirically correlated to the wide range of fabrication conditions through the use of a general power law. In addition, the validity of the conventional simple diffusioii annealing model is investigated in detail.

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Mode index measurements of optical slab waveguides fabricated by proton -exchange with pyrophosphoric acid in z -cut LiNbO3 have been made. The index profile is approximately a step with an index increase of .131 at T = 200°C. In addition to establishing formulae for the effective diffusion constant (De) and guide depth (d) for a given diffusion temperature and time, an investigation of the often neglected anisotropic nature of these waveguides is presented.