Recently, the concentration of 〖CO〗_2, one of the major air pollutants for greenhouse effect, is increasing due to the massive use of fossil fuels. Thus, research about gas sensors for monitoring 〖CO〗_2 gas have performed, and conventional methods have the challenge of requiring complex structures. Thus, research about gas sensors using nanomaterials has been conducted, and graphene-based gas sensors have been actively researched since its extraordinary conductivity. However, there are challenges that the gas absorption site is limited in chemically unstable site. In this study, ZnO/graphene heterostructure to improve the gas absorption area with high conductivity through ZnO on graphene was presented. Each layer acted as a gas adsorption and a carrier conducting layer respectively, and the sensitivity by the thickness of ZnO and the effect of the annealing temperature were evaluated. This work exhibited a sensitivity of 78% at room temperature, and repeatability and selectivity were also studied.

We presented microfluidic resistive pulse sensing for submicron particles and exosomes with high sensitivity via multiple gates and gate structure modification.

In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop size of the DRIE surface through changing the process recipe. The fabrication of a planar disk-type MEMS rotor through the MEMS fabrication process was carried out, and for the comparison of the improvements in the performance of each rotor, RPM testing and open circuit output voltage experiments of stators and permanent magnets were performed. We found that the smooth etching profile with a minimized scallop size formed using DRIE results in improved rotation properties in MEMS-based wind turbine rotors.