In this study, measurement standards with irregular surface topography which can be used for surface texture measuring instruments of various measurement principles are proposed, and the verification system for surface texture measuring instruments is established using the measurement standard. We have generated the software gauge data with 3D irregular surface texture using the non-causal 2D auto-regressive model (2D AR model). This model can generate periodic irregular surface topography data from specified surface texture parameters, and based on the generated software gauge data, the measurement standards were manufactured by machining with a diamond ball end mill. The short wavelength components which cannot be processed by the ball end mill were removed from the original machining data by the morphological filter. Manufactured measurement standards were measured using three types of surface texture measuring instruments. Proposed measurement standards can be used for various types of measuring instruments.

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This paper describes the software gauge data for surface texture standard using the non-causal 2D auto-regressive model (A-R model). This model can provide with 3D irregular surface topography and intentional geometrical characteristics from specified surface texture parameters. The measurement area consists of a periodical combination of the generated sampling area data. The surface roughness parameters introduced from the gauge data on a defined evaluation area can be insensitive to size and location of the evaluation area size. Adequate measuring conditions to utilize the surface material measures were investigated and then the evaluation area and sampling distance for areal profiling by a stylus instrument were clarified.