No abstract

No abstract

No abstract

Exploiting the benefits of PIN photodiodes, a correlating detector and a novel difference integrator concept were realized in a single-chip range-finder solution. The PIN photodetector performing already internal modulation has a responsivity of R=0.30A/W at 660nm. A bandwidth of f 3dB =250MHz with correlation gates on thin oxide, respectively 500MHz on field oxide were achieved. Both challenges of the distance measurementhigh sensitivity for signals in the order of nW and accuracies of 1.6% (1.7%) for 10m (15m) -could be reached. The measurement range goes from 20cm to 15m. The chip was realized in a modified 0.6µm BiCMOS process. Effective pixel size is ~250 170µm² including the photoreceiver of ~100 100µm² resulting in a fill factor of ~24%.

The presented integrated optical distance measurement sensor works on the time-of-flight principle. The distance information is obtained from the correlation of received light and the transmitted signal. The PIN-Bridge circuit concept ensures suppression of background light by equally charging and discharging the capacitor within one period, while integrating the wanted signal. A single distance measurement is performed in 8ms. With averaging an accuracy of better than 1% is achieved for a distance of 3.7m. Effective pixel size is 150x200µm² having a fill-factor of ~10%. The sensor was manufactured in a modified standard 0.6µm BiCMOS process.