A comprehensive experimental study was carried out to replicate sub‐micron features using the injection molding technique. For the experiments, five different plastic materials were selected according to their flow properties. The materials were polycarbonate (PC), styrene‐butadiene block copolymer (SBS), impact modified poly(methyl methacrylate), methyl methacrylate‐acrylonitrile‐butadiene‐styrene polymer (MABS), and cyclic olefin copolymer (COC). Nanofeatures down to 200‐nm line width and with aspect ratios (aspect ratio = depth/width) of 1:1 could be replicated. In all selected materials, the greatest differences between the materials emerged when the aspect ratio increased to 2:1. The most favorable results were obtained with the use of high flow polycarbonate as the molding material. The best replication results were achieved when melt and mold temperatures were higher than normal values.
Many fields of industry are looking for growth from miniaturisation. Because competition is increasing, costs are becoming more important in mass production. These are the driving forces for improving and developing micro injection moulding and replication technologies. This experimental study was carried out to replicate sub-micrometre features using the micro injection moulding technique. For the experiments, polycarbonate (PC) was selected because of its flow properties. The effects of processing parameters on the replication properties were observed. The best replication results were achieved when a small injection piston diameter and large shot size were used in micro injection moulding.
Replication of surface relief microstructures into COC (cyclic ole®n copolymers) plastics using a hot embossing technique is considered. The replication accuracy has been investigated by optical characterization and scanning electron microscopy (SEM) of the replicated surface pro®le, which is a diffractive anti-re¯ection layer. Good agreement between theoretical and experimental results is shown.
Wire-grid polarizers for terahertz region were fabricated by manufacturing triangular grating using a ruling-based, ultraprecision diamond machining process and replicating the pattern into polymethylpentene (TPX) and cyklo-olefin copolymer (COC) sheets using hot embossing. On top of the imprinted structures, aluminum was evaporated in an oblique angle, forming an aluminum wire grid. The achieved extinction rate was over 150 for TPX polarizers and near 1000 for COC polarizers.
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