Silicon Mach-Zehnder modulators with reduced series resistance in lateral PN junction rib-waveguide phase shifters for enhanced high-speed response are fabricated and characterized. Extinction ratio higher than 10 dB is obtained at 10.3-11.7 Gbps with mask margins of 27% (10.3-Gbps 10GBE), 16% (10.7-Gbps STM-64/OC-192) and 10% (11.3-Gbps STM-64/OC-192) in eye-diagram measurements incorporating mask tests using a RF cut-off filter. In unfiltered eye-diagram measurements without mask tests, extinction ratio higher than 13 dB is obtained at 10.0-12.5 Gbps. The silicon modulators reveal high-speed performance comparable with that of lithium-niobate modulators in high-speed optical fiber telecommunications.

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The 11-Gbps 80-km transmission performance of a zero-chirp silicon Mach-Zehnder modulator has been characterized. The zero-chirp characteristic of the silicon modulator is confirmed in the constellation measurement, and gives high tolerance both for positive and negative chromatic dispersion. A low-dispersion-penalty transmission up to 80 km using the 11-Gbps non return-to-zero on-off-keying format is confirmed via bit-error-rate measurements with a performance comparable to that of a commercial lithium-niobate modulator. The dispersion tolerance at 2-dB power penalty for a bit-error-rate of 10(-3) is more than ± 950 ps/nm. Further, 22.3-Gbps binary phase-shift-keying is demonstrated, and the back-to-back power penalty with respect to the lithium-niobate modulator is less than 0.5 dB.

A low-loss high-speed silicon in-phase (I) quadrature (Q) modulator is designed, fabricated and characterized. The fabricated IQ modulator has a low passive optical loss of 9 dB in C and L bands. Using the modulator, differential quadrature phase-shift keying (DQPSK) transmission at 44.6 Gb/s with differential detection is confirmed with an optical signal-to-noise ratio (OSNR) of 16.3 dB for a bit error rate (BER) of 10(-3) and a dispersion tolerance of -96 to 107 ps/nm. Moreover, in digital coherent detection, quadrature phase-shift keying (QPSK) up to 64 Gb/s are achieved with an OSNR of 11.6-11.8 dB for a BER of 10(-2) at 1530, 1550, and 1610 nm.

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