Recent developments in cluster ion beams for secondary ion mass spectrometry (SIMS) have enabled the realization of molecular depth profiling and mass imaging of organic and biological materials. Massive Ar cluster beams present reduced surface damage and fragmented ion generation and are suitable as primary beams for SIMS. We recently obtained a finely focused massive 1.2-µm-diameter cluster ion beam and combined it with an orthogonal acceleration time-of-flight mass spectrometer. A mesh pattern of a phospholipid thin film was clearly reproduced in the mass images of molecular ions with a measurement time of 100 s.

This paper investigates the porosity-dependent tensile mechanical properties of porous silver films that are 8-10 μm thick. The silver films are fabricated with a pressure press; the use of different pressures changes the porosity (p) in the range of 5% to 25%. p is determined using scanning electron microscopy cross-sectional images of the films. Stress-strain (S-S) curves are obtained by tensile tests performed on the porous and bulk silver films. The conventional ductile plateau disappears from the porous films. Augmented ultimate tensile strength and a smaller breaking strain occur when p is in the range 6%-14%.

This paper investigates the influence of temperature on tensile mechanical properties of sintered silver (s-Ag) films with 8–10 μm in thickness for fundamental reliability design of semiconductor systems. The s-Ag film sintered under a pressure of 60 MPa possesses the porosity (p) around 5% determined from cross-sectional scanning electron microscope (SEM) images. The stress–strain (S-S) curves of s-Ag and pure silver (p-Ag) films are obtained using originally designed uniaxial tensile tester at temperatures from 25 °C to 150 °C. The S-S curves of p-Ag indicate ductile behavior irrespective of temperature, whereas those of s-Ag indicate brittle-ductile transition at 120 °C. Compared with p-Ag, s-Ag possesses low Young’s modulus (E) and high ultimate tensile strength (UTS) below 80 °C. The mechanism of brittle-ductile transition is discussed based on fracture surface observation results.