-Calculation of dielectric constant of buffer layer graphene on SiC substrate measured by Spectroscopic Ellipsometry using Gauss-Newton inversion method has been done. The data obtained from spectroscopic ellipsometry measurement are amplitude ratio (Ψ) and phase difference (Δ). The results show that Gauss-Newton numerical inversion method can be used to extract the dielectric constant of nanostructured graphene on SiC substrates (in this case buffer layer graphene). Through the Gauss-Newton numerical inversion method, we obtain the thickness of buffer layer is around 0.5 to 1 ML and has different dielectric constant value as compared to that of graphene films.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.