The possibility of measuring hydrogen depth profiles by means of electron spectroscopy is demonstrated. In the near-surface layer with a thickness corresponding to the inelastic mean free path (IMFP) the elastic peak electron spectroscopy (EPES) is employed for this purpose. For measuring hydrogen isotope depth profiles deeper in the solid at depths corresponding to the transport mean free path (which is by several orders of magnitude larger than the IMFP) the so-called spectroscopy of reflected electrons (SRE) is used. In this work, the SRE technique is employed for the investigation of a pure beryllium sample and a beryllium sample implanted with deuterium atoms.

New quantitative method of hydrogen isotopes detection in engineering materials used for fusion is introduced. The study proposes a theory of small-angle atomic particle elastic reflection from multicomponent materials. A method for interpreting Elastic Peak Electron Spectroscopy signals considering the multiple scattering effect was developed. It is shown that ignoring the multiple scattering effect results in significant errors with quantitative evaluation of Elastic Peak Electron Spectroscopy signals.

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