Mask repair is an essential step in the manufacturing process of extreme ultraviolet (EUV) masks. Its key challenge is to continuously improve resolution and control to enable the repair of the ever-shrinking feature sizes on mask along the EUV roadmap. The state-of-the-art mask repair method is gas-assisted electron-beam (e-beam) lithography also referred to as focused electron-beam induced processing (FEBIP). We discuss the principles of the FEBIP repair process, along with the criteria to evaluate the repairs, and identify the major contributions determining the achievable resolution. As key results, we present several high-end repairs on EUV masks including a sub-10-nm extrusion achieved with the latest generation of e-beambased mask repair tools, the MeRiT ® LE. Furthermore, we demonstrate the corresponding repair verification using at-wavelength (actinic) measurements. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

In this work the two massive forming processes linear flow splitting and linear bend splitting, which generate profiles from sheet metal, are evaluated with respect to characteristic manufacturing‐induced material properties of the produced parts. Resulting microstructural features such as grain size and shape as well as crystallographic textures are linked to mechanical properties such as strength, ductility and anisotropic elasticity and general rules for their evolution are defined. Residual stress distributions are detailed and discussed with regard to the causing geometrical and forming process related aspects. The aim of this paper is to give a comprehensive overview of the properties of profiles produced by linear flow splitting and linear bend splitting and to illustrate general rules for their evolution in order to provide guidelines for an optimized product development process which allows a beneficial use of the manufacturing‐induced properties.

Sheet metal is available in a wide range of properties and material composition. There are standardized quality characteristics for mechanical and geometrical properties in the plane of the sheet. However, the band edges are influenced by the correspondent metal working process and the properties may vary or be unknown. The forming zone of the manufacturing process linear flow splitting is located at the band edge. Thus, the knowledge of probable influences of metal working induced band edge properties on the process of linear flow splitting is essential and this knowledge will be presented in the following article.Keywords: Linear flow splitting / band processing / quality of semi-finished goods / influencing parameters / sensitivity analysis Das Halbzeug Blech ist in einem breitem Werkstoff-und Eigenschaftsportfolio verfügbar. Von den Herstellern werden für das mechanische Verhalten und die geometrischen Eigenschaften zahlreiche Qualitätsmerkmale sichergestellt. Für den Bereich der Bandkante gibt es jedoch keine standardisierten Kriterien. Diese wird durch das entsprechende Bearbeitungsverfahren beeinflusst. Bei dem Massivumformverfahren Spaltprofilieren liegt die Umformzone genau an der Bandkante. Die Kenntnis über den Einfluss der Kantenbearbeitung auf den Spaltprofilierprozess ist daher essentiell und soll in diesem Beitrag aufgezeigt werden.

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