By employing a single AlGaN layer with low Al composition, high quality and uniformity AlGaN/GaN heterostructures have been successfully grown on Si substrates by metal-organic chemical vapor deposition (MOCVD). The heterostructures exhibit a high electron mobility of 2150 cm2 /Vs with an electron density of 9.3 × 10 12 cm −2 . The sheet resistance is 313 ± 4 Ω/◻ with ±1.3% variation. The high uniformity is attributed to the reduced wafer bow resulting from the balance of the compressive stress induced and consumed during the growth, and the thermal tensile stress induced during the cooling down process. By a combination of theoretical calculations and in situ wafer curvature measurements, we find that the compressive stress consumed by the dislocation relaxation (~1.2 GPa) is comparable to the value of the thermal tensile stress (~1.4 GPa) and we should pay more attention to it during growth of GaN on Si substrates. Our results demonstrate a promising approach to simplifying the growth processes of GaN-on-Si to reduce the wafer bow and lower the cost while maintaining high material quality.Recently, AlGaN/GaN heterostructures grown on Si substrates have attracted much attention for high power, high frequency, and high temperature applications [1][2][3][4] . These can offer several advantages such as large wafer size, high thermal conductivity, low cost, and great potential of the compatibility with existing processing technologies developed for Si integrated circuits [5][6][7][8] . Despite the promising applications, GaN-on-Si technology is facing reproducibility and reliability issues, which are likely to be related to growth processes and crystalline quality (defects and residual stress) 1,9 . Due to the large lattice mismatch and thermal mismatch between GaN and Si substrates, it is challenging to grow high-quality and stress-free GaN-based epilayers. Several complicated stress-control approaches such as patterned Si substrate technology 10 , LT-AlN 11 , AlN/GaN superlattice 12,13 , and compositionally graded AlGaN layer 14,15 have been proposed to achieve crack-free GaN based heterostructures. However, the crystalline quality (defects and residual stress), as well as uniformity issues still remain, especially for growth onto large diameter substrates.For the method with compositionally graded buffers, three step-graded AlGaN (with Al composition of about 75%, 50% and 25%) or multiple step-graded AlGaN buffers with thickness up to 1 μm are generally used [15][16][17] . The main purpose of this method is to slow down the relaxation rate of compressive stress by decreasing the lattice mismatch between the two neighbouring layers. There is thus a larger compressive stress accumulated in the GaN layer during the growth at high temperature. One issue in this case with thick buffers is that the wafer is convexly bowed. As a result, it will significantly affect the wafer uniformity during the subsequent growth. Another issue is that the growth rate of AlGaN ternary alloy is generally lower than that of GaN layer an...
Discrimination of glycoproteins with different glycans is a significant but difficult issue. We presented here a new strategy for strengthening the discrimination of glycoproteins by introducing a new signaling channel, fluorescence polarization (FP), into a "single probe with three signaling channels" sensor array. The single probe was aminophenylboronic-acid-conjugated poly(acrylic acid)-Mn-doped ZnS quantum dots, and the three signaling channels were FP, room temperature phosphorescence and light scattering. Ten glycoproteins, including ovalbumin, fibrinogen, transferrin, horseradish peroxidase, vascular endothelial growth factor, immunoglobulin G, avidin, hyaluronidase, cellulase R-10, and glucose oxidase, were involved for evaluating the discriminating capability. The introduction of the FP signaling channel improved the discriminating power of the sensor array, so that the 10 glycoproteins at 0.15 μM could be well discriminated both in PBS buffer and in the presence of human serum sample. The identification accuracy of the unknown samples was 96.25% (77 out of 80) at the 0.15 μM level and 97.50% (78 out of 80) at the 0.2 μM level. The integration of the signaling patterns with different responsive principles was demonstrated as the promising way to enhance the discrimination power of the single-probe-based sensor arrays.
A large lattice-mismatch induced stress control technology with a low Al content AlGaN layer has been used to grow high quality GaN layers on 4-in. Si substrates. The use of this technology allows for high mobility AlGaN/GaN heterostructures with electron mobility of 2040 cm2/(V·s) at sheet charge density of 8.4 × 1012 cm−2. Strain relaxation and dislocation evolution mechanisms have been investigated. It is demonstrated that the large lattice mismatch between the low Al content AlGaN layer and AlN buffer layer could effectively promote the edge dislocation inclination with relatively large bend angles and therefore significantly reduce the dislocation density in the GaN epilayer. Our results show a great potential for fabrication of low-cost and high performance GaN-on-Si power devices.
We present herein a new single probe, polyethyleneimine (PEI)/MnZnS nanocomposite, for two‐color imaging and three‐dimensional sensing. The PEI/MnZnS nanocomposite possesses unique, individually excited, two‐color, photoluminescence (PL) emissions at λ=495 and 585 nm; this allows two‐color imaging of the same space just by changing the excitation wavelength in situ. Moreover, the two PL bands of the nanocomposite are orthogonal, which allows the discrimination of eight proteins just by recording the three‐channel optical signals of the single probe. The two PL bands of the PEI/MnZnS composite are capable of distinguishing eight proteins at 0.5 μM, whereas the three‐channel signals (two PL bands and light scattering) can discriminate these proteins at no less than 0.25 μM.
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