No abstract

Here we present a new microfabricated optical endoscope using a fully integrated optical waveguide with a push-pull piezoelectric actuator design. This new scanning probe was constructed using SU-8 epoxy-based photoresist as a resonant cantilever. The scanner was driven with a frequency of 25 Hz in the horizontal direction and a frequency of 4.71 kHz in the vertical direction. The best resolution obtained by the scanner is ~ 4 μm. A specific application for the design is in the area of endoscopy, where there is a need for a minimally invasive device that reduces the discomfort experienced by the patient by reduces the overall geometry of the endoscope.

In this paper, we present the design and fabrication of a 1D beam steering device based on planar electro-optic thermal-plastic prisms and a collimator lens array. With the elimination of moving parts, the proposed device is able to overcome the mechanical limitations of present scanning devices, such as fatigue and low operating frequency, while maintaining a small system footprint (~0.5mm×0.5mm). From experimental data, our prototype device is able to achieve a maximum deflection angle of 5.6° for a single stage prism design and 29.2° for a cascaded three prisms stage design. The lens array shows a 4µm collimated beam diameter.