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The PCIV (Point Contact Current-Voltage) methodfor de termination afthe doping concentration profiles of Si structures on a bevelled surface is presented. The equipment initially intended for the spreadi ng resistance (SR) method was modified considerably to allow measurements by pew technique. In this article the designed and constructed measurin g device is described A calibration technique for measurements on Si and an analysi s of the range of carrier concentration that can be measured by PClV technique on Si samples are presented. Also results of measurement on epitaxial and implanted Si samples are given. The results obtained by PClV method are compared with the results obtained by the spreading resistance technique (SSM.150 equipment).1. Introduction 99 The point contact current voltage (peIV) method [2 -4] is a modification of the spreading resistance (SR) technique. This method was developed primarily due to the low resolution of SR on III-IV semiconductors. The only difference is that these methods use different parts of the I-V curve. While SR measures the current through the sample at a constant voltage of 5 mY, pelY uses a constant current (0.5 J.tA) and measures the voltage drop between the contacts. These methods provide very good possibilities fOf evaluating Si and GaAs structures as well [5,6].In this article, PCIV method is used on Si samples. We present a modification of the measuring equipment intended for SRP measurements also for PCIY. The results obtained by PCIY method are compared with the results from SR (SSM-ISO). 2.Experimental results and discussionThe main parts of our measuring system were developed at the Department of Solid StateEngineering, Czech Technical University. The system was primarily designed for SR measurements. The probe.is loaded by a weight of 5 g and slowly lowered onto the surface of the sample as gently as possible, using thennal expansion of an electrically heated wire. The probe material (tungsten carbide) is harder than silicon and fractures the silicon surface, 0-7803-8535-7

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