A new versatile tool, combining Shear Force Microscopy and X-Ray Spectroscopy was designed and constructed to obtain simultaneously surface topography and chemical mapping. Using a sharp optical fiber as microscope probe, it is possible to collect locally the visible luminescence of the sample. Results of tests on ZnO and on ZnWO4 thin layers are in perfect agreement with that obtained with other conventional techniques. Twin images obtained by simultaneous acquisition in near field of surface topography and of local visible light emitted by the sample under X-Ray irradiation in synchrotron environment are shown. Replacing the optical fibre by an X-ray capillary, it is possible to collect local X-ray fluorescence of the sample. Preliminary results on Co-Ti sample analysis are presented.

XRF (X-ray fluorescence) is a powerful technique for elemental analysis with a high sensitivity. The resolution is presently limited by the size of the primary excitation X-ray beam. A test-bed for confocal-type XRF has been developed to estimate the ultimate lateral resolution which could be reached in chemical mapping using this technique. A polycapillary lens is used to tightly focus the primary X-ray beam of a low power rhodium X-ray source, while the fluorescence signal is collected by a SDD detector through a cylindrical monocapillary. This system was used to characterize the geometry of the fluorescent zone. Capillary radii ranging from 50 μm down to 5 μm were used to investigate the fluorescence signal maximum level This study allows to estimate the ultimate resolution which could be reached in-lab or on a synchrotron beamline. A new tool combining local XRF and scanning probe microscopy is finally proposed.

Capillary optics are used for X‐ray fluorescence micro‐analysis using the Cu Kα line provided by a rotating anode. The excitation beam is focused using a polycapillary lens on a Co–Ti sample. Cylindrical glass capillaries of various diameters are fitted to the X‐ray detector (Energy Dispersive X‐Ray (EDX) analyzer) and displaced along the irradiated zone of the sample. The fluorescence is studied as a function of capillary position. Good agreement is found between experimental and calculated lateral widths of the fluorescence collection, taken into account the cylindrical capillary critical angles relevant in the experiment. The influence of the cylindrical capillary diameter on the signal level detected is studied to estimate the possibility of lateral resolution increase of X‐ray fluorescence technique both in‐lab and in synchrotron environment. Copyright © 2013 John Wiley & Sons, Ltd.