One of fundamental aims of extreme ultraviolet (EUV) lithography is to maximize brightness or conversion efficiency of laser energy to radiation at specific wavelengths from laser produced plasmas (LPPs) of specific elements for matching to available multilayer optical systems. Tin LPPs have been chosen for operation at a wavelength of 13.5 nm. For an investigation of EUV radiation of laser-produced tin plasmas, it is crucial to study the related atomic processes and their evolution so as to reliably predict the optimum plasma and experimental conditions. Here, we present a simplified radiation hydrodynamic model based on the fluid dynamic equations and the radiative transfer equation to rapidly investigate the evolution of radiation properties and dynamics in laser-produced tin plasmas. The self-absorption features of EUV spectra measured at an angle of 45° to the direction of plasma expansion have been successfully simulated and explained, and the evolution of some parameters, such as the plasma temperature, ion distribution and density, expansion size and velocity, have also been evaluated. Our results should be useful for further understanding of current research on extreme ultraviolet and soft X-ray source development for applications such as lithography, metrology and biological imaging.
Charge exchange between highly charged ions and neutral atoms and molecules has been considered as one of important mechanisms controlling soft X-ray emissions in many astrophysical objects and environments. Whereas for modelling charge exchange soft X-ray emission these data of n and l-resolved state selective capture cross sections are often obtained by empirical and semi-classical theory calculations. With a newly-built cold target recoil ion momentum spectroscopy (COLTRIMS) apparatus, we perform a series of measurements of Ne (8;9)+ ions charge exchange with He and H 2 for the collision energy ranging from 1 to 24.75 keV/u. n-resolved state-selective capture cross sections are reported. By comparing the measured state-selective capture cross sections to these calculated by the multichannel Landau-Zener method (MCLZ), it is found that MCLZ calculations are in a good agreement with the measurement for the dominant n capture for He target. Furthermore, by using nl-resolved cross sections calculated by MCLZ and applying l distributions commonly-used in astrophysical literatures to experimentally derived n-resolved cross sections, we calculate the soft X-ray emissions in the charge exchange between 4 keV/u Ne 8+ and He by considering the radiative cascade from the excited Ne 7+ ion. Reasonable agreement is found in comparison to the measurement for even and separable models, and MCLZ calculations give results in a better agreement.
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