The latest advances in MEMS technology have enabled the design of a new generation of electronic microsystems products. These systems may combine numerous analog/mixed signal microelectronics blocks and MEMS functions on a single chip or on two or more chips assembled within an integrated package. As designers have begun to use CAD tools to insert MEMS into these new products, additional requirements and constraints on the tools are emerging. As the MEMS designs move from prototypes to manufacturing production new CAD issues emerge.Some ofthese design tool needs are:. The design flow must be streamlined and integrated, avoiding feature duplication among CAD tools . The tools must move from the analysis realm to the design realm.. The tools must address IP creation and design re-use for product design to be cost effective . The tools must be foundry ready and address manufacturing variations and reliability issues . Modeling continues to be a key issue in microsystem design. This paper will present extensions to our integrated solution for the development of Micro Electro Mechanical Systems (MEMS) that combines aspects of electronic design automation with mechanical, thermal, and fluidic computer-aided design. Based on our experience in applying these tools to real world problems and observing previous generations of CAD tool usage, we have adapted our design methodology and created an enhanced tool suite.

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MEMS design tools are increasingly important as micro systems find wider applications. Though established structured design methodologies are in place for VLSI design, these tools cannot be applied to MEMS design without adaptation.Several needs must be met to enable MEMS design: (1) non-linear, dynamic and multi-energy domain design and simulation;(2) expression of complex and curvilinear geometries; (3) arbitrary orientation and placement of MEMS components; and (4) comprehensive, three-dimensional visualization and analyses.We describe a structured design methodology for MEMS CAD that addresses the non-separable, helical nature of MEMS device and system design, including both top-down and bottom-up strategies. The iterative design process integrates custom layout, synthesis, verification and optimization with model building and library construction. Our integrated MEMS CAD suite includes libraries of MEMS device components and their models and tools for: (a) physical design, (b) mixed-domain FEIBE analysis, (c) placement and routing synthesis, (d) macromodel construction, (e) schematic design entry and system level behavioral simulation , and (I) layout extraction and design rule checking verification. The tools are demonstrated on designs of micro-resonators. Simulated and fabricated devices are compared. MEMS Pro is used to design devices and systems and predict their performance.

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