The propagation properties of leaky surface acoustic waves (LSAWs) and longitudinal-type LSAWs (LLSAWs) on a LiNbO3 (LN) or LiTaO3 (LT) thin plate bonded to an AT-cut quartz or c-plane sapphire (c-Al2O3) substrate with a high phase velocity were investigated. It was theoretically revealed that when the LN or LT thin-plate thickness is less than one wavelength, the particle displacement of LLSAWs was concentrated in the thin plate and the electromechanical coupling factor (K2) was increased to two to three times that in the single substrate. Furthermore, for 36° Y-cut X-propagating LT/c-Al2O3 with an LT thin-plate thickness of 0.35 λ and X-cut 36° Y-propagating LN/c-Al2O3 with an LN thin-plate thickness of 0.19 λ, the values of K2 for an LSAW and an LLSAW were experimentally found to increase from 5.6 and 10.4% in the single substrate to 11.5 and 19.7% in the thin-plate bonded structure, respectively.

A longitudinal-type leaky surface acoustic wave (LLSAW) has a high phase velocity. Therefore, LLSAW devices are suitable for applications to high-frequency filters. However, the attenuation of LLSAWs is higher than that of other SAW modes. This higher attenuation of LLSAWs, which causes a low Q factor, can be reduced by growing a higher-velocity film on a piezoelectric substrate. On the other hand, K2 in the layered structure decreases because of the small piezoelectricity in high-velocity films. In this study, LLSAW propagation characteristics on a layered structure consisting of high-piezoelectric ScAlN film/X-cut 36°Y-propagation LiNbO3 were investigated. When a or ScAlN film was loaded, the reduction of the attenuation was observed, but K2 for this layered structure is lower than that of LiNbO3. On the other hand, K2 for Sc0.4Al0.6N film/LN is higher than that of LiNbO3.

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