We present a temporally-stable active mount to compensate for manufacturing-induced deformations of reflective optical components. In this paper, we introduce the design of the active mount, and its evaluation results for two sample mirrors: a quarter mirror of 115 × 105 × 9 mm³, and a full mirror of 228 × 210 × 9 mm³. The quarter mirror with 20 actuators shows a best wavefront error rms of 10 nm. Its installation position depending deformations are addressed by long-time measurements over 14 weeks indicating no significance of the orientation. Size-induced differences of the mount are studied by a full mirror with 80 manual actuators arranged in the same actuator pattern as the quarter mirror. This sample shows a wavefront error rms of (27±2) nm over a measurement period of 46 days. We conclude that the developed mount is suitable to compensate for manufacturing-induced deformations of large reflective optics, and likely to be included in the overall systems alignment procedure.

Abstract. The alignment procedure is an important step in the process chain of the assembly of micro-optical components and has a direct impact on the system performance of the micro-optical system, the necessary assembly time and the manufacturing costs. For these reasons, only alignment procedures that are adapted to the special requirements of each assembly task will be able to save costs and attain the best optical system performance. The paper describes the alignment methods and illustrates the assembly procedures based on selected micro-optical examples.

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Technical challenges and directions for microoptical and optoelectronical packaging include the development of special handling tools for manual and automated assembly stations. These tools not only have to be precise, but also reliable in a mass production environment. The design process for handling devices therefore is a major issue and an approach to it will be presented.Several examples illustrate how the proposed design algorithm was used to solve assembly tasks like fiber handling and microlens-positioning.

We report on the development of an active mount with an orthogonal actuator matrix offering a stable shape optimization for gratings or mirrors. We introduce the actuator distribution and calculate the accessible Zernike polynomials from their actuator influence function. Experimental tests show the capability of the device to compensate for aberrations of grating substrates as we report measurements of a 110x105 mm2 and 220x210 mm2 device With these devices, we evaluate the position depending aberrations, long-term stability shape results, and temperature-induced shape variations. Therewith we will discuss potential applications in space telescopes and Earth-based facilities where long-term stability is mandatory