With tightly focused femtosecond laser pulses, waveguides are fabricated in fused silica. The guiding and attenuation properties of these waveguides at wavelengths of 514 nm and 1.5 microm are studied. We demonstrate that by changing only the writing speed, waveguides with a controllable mode number can be produced.
For the first time to the authors' knowledge, optical waveguides have been inscribed in bulk crystalline silicon by ultrafast laser radiation. Femtosecond laser pulses of 40-nm spectral bandwidth, 1-kHz repetition rate, and 1.7-microJ on-target energy were applied at a mid-infrared wavelength of 2.4 microm to induce nonlinear absorption in the focal volume of the beam. By scanning the laser beam with respect to the sample, buried optical waveguides have been created that were single mode at 1550 and 1320 nm and guided light only with its polarization perpendicular to the sample's surface. Propagation losses with an upper limit of 1.2 dB/cm or less were observed throughout the optical telecommunications band.
The propagation of light in 5 x 5 and 7 x 7 cubic lattices of evanescently coupled waveguides is investigated for the first time, to the authors' knowledge. The results reveal ideal discrete diffraction and demonstrate the excellent quality of the waveguide arrays, which were manufactured in fused silica by femtosecond-laser-induced refractive-index modifications.
Possibilities to produce sub-diffraction limited structures in thin metal films and bulk dielectric materials using femtosecond laser pulses are investigated. The physics of ultrashort pulse laser ablation of solids is outlined. Results on the fabrication of sub-micrometer structures in 100-200 nm chrome-coated surfaces by direct ablative writing are reported. Polarization maintaining optical waveguides produced by femtosecond laser pulses inside crystalline quartz are demonstrated.
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