The fabrication of high-capacity, binder-free Li–ion battery anodes using a simple and efficient manufacturing process was reported in this research. The anode material for lithium–ion batteries utilized is a combination of two-dimensional (2D) carbon nanowalls (CNWs) and Cu nanoparticles (improved rate performance and capacity retention) or Si (high capacity) nanoparticles. A methane (CH4) and hydrogen (H2) gas mixture was employed to synthesize CNWs on copper foil through microwave plasma-enhanced chemical vapor deposition (PECVD). The Cu or Si nanoparticles were then deposited on the CNW surface using an RF magnetron sputtering equipment with four-inch targets. To analyze the electrochemical performance of the LIBs, CR2032 coin-type cells were fabricated using anode materials based on CNWs and other components. It was confirmed that the Cu−CNW demonstrates improved rate performance, increased specific capacity, and capacity retention compared with traditional anodes. Additionally, CNW combined with Si nanoparticles has enhanced the capacity of LIB and minimized volume changes during LIB operation.

This research is conducted in order to investigate the structural and electrical characteristics of carbon nanowalls (CNWs) according to the sputtering time of interlayers. The thin films were deposited through RF magnetron sputtering with a 4-inch target (Ni and Ti) on the glass substrates, and the growth times of the deposition were 5, 10, and 30 min. Then, a microwave plasma-enhanced chemical vapor deposition (PECVD) system was used to grow CNWs on the interlayer-coated glass substrates by using a mixture of H2 and CH4 gases. The FE-SEM analysis of the cross-sectional and planar images confirmed that the thickness of interlayers linearly increased according to the deposition time. Furthermore, CNWs grown on the Ni interlayer were taller and denser than those grown on the Ti interlayer. Hall measurement applied to measure sheet resistance and conductivity confirmed that the electrical efficiency improved significantly as the Ni or Ti interlayers were used. Additionally, UV-Vis spectroscopy was also used to analyze the variations in light transmittance; CNWs synthesized on Ni-coated glass have lower average transmittance than those synthesized on Ti-coated glass. Based on this experiment, it was found that the direct growth of CNW was possible on the metal layer and the CNWs synthesized on Ni interlayers showed outstanding structural and electrical characterizations than the remaining interlayer type.

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