When polyimide (Kapton) or polybenzimidazole (PBI) are irradiated by a 248 nm KrF laser, their electrical conductivity is increased permanently. Conductivity increases of up to fifteen orders of magnitude were observed, and conductivities on the order of 1–10 Ω−1 cm−1 were obtained. The laser-induced conductivity increase of polyimide depends on the fluence per laser shot and the total fluence delivered (dosage) and exhibits a fluence threshold of ∼20 mJ cm−2 per laser shot, as well as a dosage threshold.

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A new concept based on a Fabry-Pérot interferometer for the generation of nondiffracting Bessel beams is described and proposed for potential applications in microlithography such as the fabrication of small isolated patterns. It was experimentally demonstrated that the depth of focus can be increased by a factor of about 2, and simultaneously the transverse resolution improved by a factor of 1.6, when using this technique to image contact holes. The properties of simultaneous imaging of two contact holes were also investigated. It was shown experimentally that, even in the most critical case ͑when the first diffraction rings overlap͒, undesirable interference effects between the adjacent contact holes can be eliminated by means of a phase shifting technique.

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Dimensions for 32nm generation logic are expected to be ~45nm. Even with high NA scanners, the k 1 factor is below 0.32. Gridded-design-rules (GDR) are a form of restricted design rules (RDR) and have a number of benefits from design through fabrication. The combination of rules and topologies can be verified during logic technology development, much as is done with memories. Topologies which have been preverified can be used to implement random logic functions with "hotspot" prevention that is virtually context-independent. Mask data preparation is simplified with less aggressive OPC, resulting in shorter fracturing, writing, and inspection times. In the wafer fab, photolithography, etch, and CMP are more controllable because of the grating-like patterns. Tela Canvas™ GDR layout was found to give smaller area cells than a conventional 2D layout style. Variability and context independence were also improved.