Titanium oxide (TiO 2 ) thin films were formed on a Si substrate by metalorganic decomposition at temperatures ranging from 600 • C to 1000 • C. As-deposited films were in the amorphous state and were completely transformed after annealing at 600 • C to a crystalline structure with anatase as its main component. During crystallization in oxygen atomosphere, a reaction between TiO 2 and Si occurred at the interface, which resulted in the formation of a thin interfacial SiO 2 layer. Capacitance-voltage measurement showed good dielectric properties with a maximum dielectric constant of 76 for films annealed at 700 • C. For the crystallized TiO 2 films, the interface trap density was 1 × 10 11 cm −2 eV −1 , and the leakage current was 1 × 10 −8 A/cm 2 at 0.2 MV/cm. The modified structure of TiO 2 /SiO 2 /Si is expected to be suitable for the dielectric layer in an integrated circuit in place of SiO 2 or Si 3 N 4 films.

Crystalline CeO2 films were formed on a Si (100) substrate by metalorganic decomposition at temparatures ranging from 600°C to 800°C. As-deposited films were in the amorphous state and were completely transformed to crystalline CeO2 above 600°C. However, during crystallization in oxygen atomosphere, a reaction between CeO2 and Si occurred at the interface, which resulted in the formation of a thin interfacial SiO2 layer. Capacitance-voltage measurement on these films showed good dielectric properties with a dielectric constant of 15, which is more than three times higher than that of SiO2. The modified structure of CeO2/SiO2/Si is expected to be suitable for the dielectric layer in an integrated circuit, in place of conventional dielectric films such as those of SiO2 or Si3N4.

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A new method was proposed in order to increase the recording density of optical disks based on the instantaneous and transient photobleaching of organic dyes showing strong absorption at the wavelength of laser diodes. The control of laser diode intensity by excitation laser power was demonstrated in a polymerfilm dispersed with a phthalocyanine derivative.