Articles you may be interested inIn situ nanomechanical testing in focused ion beam and scanning electron microscopes Rev. Sci. Instrum. 82, 063901 (2011); 10.1063/1.3595423Fabrication of complex three-dimensional nanostructures using focused ion beam and nanomanipulation

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Along with the recent advances in nanotechnology there is a growing need for a SEM combining ultra-high resolution optics and analytical performance. Here we introduce a new design of a SEM column where recently-developed high-resolution optics [1] is brought together with traditional analytical capabilities.

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.