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High quality factor (Q-factor) is a crucial parameter for the development of precision inertial resonators. Q-factor indicates efficiency of a resonator in retaining its energy during oscillations. This paper explores the effects of different design parameters on Q-factor of a 3D hemispherical (wine-glass) inertial resonator. Thermo-elastic damping (TED) loss mechanisms in a 3D non-inverted wine-glass (hemispherical) shell resonator is systematically investigated and presented in this paper. We investigated TED loss resulting from the effects of hemisphere geometric parameters (such as thickness, height, and radius), mass imbalance, thickness non-uniformity, and edge defects. We used glassblowing to fabricate hemispherical 3D shell resonators. The results presented in this paper can facilitate selecting efficient geometric and material properties for achieving desired Q-factor in 3D inertial resonators. Enhancing the Q-factor in MEMS based 3D resonators can further enable the development of high precision resonators and gyroscopes.

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In this paper, a solid disk resonator is designed for manufacturability inside a wafer-level sealed cavity with fusion-bonding process. The device is then simulated using finite element analysis with a variety of manufacturing process tolerances to determine the effect of these variations on the performance of the resonator. It is shown that radial offset of the resonator due to misalignment during bond strongly affects in altering the operating frequencies of the resonator. The design approach considering manufacturing tolerances presented in this paper can be beneficial for high precision MEMS inertial sensor development.