Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation

Khan, Nabeel; Ahamed, Mohammed Jalal

doi:10.1007/s00542-019-04705-8

Cited by 13 publications

(7 citation statements)

References 26 publications

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“…The size, cost, performance, and accuracy of sensors must be considered constantly so that they are desired in the competitive automotive industry. MEMS sensors have emerged as the preferred solution for addressing various inertial sensing application because of their accuracy, reliability, smaller size, and cost-effectiveness [ 9 , 10 ]. MEMS sensors are being used in the auto industry as single-purpose or multipurpose sensors, including pressure, temperature, speed, position, and flow measurement sensors [ 11 ].…”

Section: Introductionmentioning

confidence: 99%

Application of MEMS Accelerometers in Dynamic Vibration Monitoring of a Vehicle

et al. 2023

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In this paper, the viability of MEMS accelerometers is investigated to measure vibration parameters related to different locations of a vehicle with respect to the automotive dynamic functions. The data is collected to compare the accelerometer performances in different locations on the vehicle, including on the hood above the engine, on the hood above the radiator fan, over the exhaust pipe, and on the dashboard. The power spectral density (PSD), together with the time and frequency domain results, confirm the strength and frequencies of the sources of vehicle dynamics. The frequencies obtained from the vibrations of the hood above the engine and radiator fan are approximately 44.18 Hz and 38 Hz, respectively. In terms of the vibration amplitude, the measured amplitudes are between 0.5 g and 2.5 g in both cases. Furthermore, the time domain data collected on the dashboard during driving mode reflects the road condition. Overall, the knowledge obtained from the various tests conducted in this paper can be advantageous for further control and development of vehicle diagnostics, safety, and comfort.

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Section: Introductionmentioning

confidence: 99%

Application of MEMS Accelerometers in Dynamic Vibration Monitoring of a Vehicle

et al. 2023

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“…The simplified equation of motion of MEMS vibratory gyroscopes is based on a spring-mass-damper system [17], which can be based on linear or torsional motion [16]. In linear MEMS gyroscopes, the proof mass should be free to vibrate in two orthogonal linear directions, in which the supporting beams are in the form of crab-leg, serpentine, U-shape, and frame [18][19][20]. The gyroscopes have a pair of principal elastic axes that define stable directions of a straight-line motion of the gyroscope [21].…”

Section: Introductionmentioning

confidence: 99%

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

Rahbar Ranji,

Li,

Alirezaee

et al. 2023

Eng. Res. Express

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Accurate estimation of the mechanical behavior of springs is crucial for the proper design of Microelectormechanical systems (MEMS). The main objective of this study is to derive a closed-form equation for the calculation of the stiffness of an inclined spring in the form of folded beams. The energy-based method was used to calculate the displacements of a folded beam that was fixed at one end and giuded at the other end. The analytical model was then compared with the finite element method using ANSYS for different inclination angles of the folded beam spring, showing good agreement. The angle on inclination has changed from zero to 180 degress, and stiffness of folded beam is detemined. The derived expressions of the compliances were checked for the case of serpentine springs with inclination angle of zero, and different length ratios against the literature. It is found that neglecting small lengths for calculating the stiffness of the folded beam spring is not justified. The influential geometrical parameters, including different lengths of the spring and inclination angle of the spring, on the stiffness are studied. It is found that the angle of inclination of the principal axes of spring constants depends on the geometrical parameters, and the angle of inclination has more effect on the stiffness of a folded beam spring than the number of folds.

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“…There exist three primary types of gyroscopes: mechanical gyroscopes, optical gyroscopes, and Coriolis vibratory gyroscopes (CVGs). In CVGs, the resonant mass serves as the core sensing element, and its geometry can vary widely, such as a single beam 6,7 , U-shaped tuning forks 8 , a butterfly [9][10][11] , disks [12][13][14][15][16][17][18][19] , rings 20,21 , cylinders [22][23][24] , and, finally, hemispheres. Hemispherical resonator gyroscopes (HRGs) are among the most successful designs for inertial navigation-grade gyroscopes, offering many advantages such as high sensitivity, low noise and high stability 1,25 .…”

Section: Introductionmentioning

confidence: 99%

A 3D-printed micro-hemispherical shell resonator with electrostatic tuning for Coriolis vibratory gyroscope

Che,

Hou,

Zhu

et al. 2023

Preprint

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The emergence of micro-hemispherical resonant gyroscopes, combining the advantages of exceptional stability and long lifetime with miniaturization, has opened up new possibilities for the development of whole-angle gyroscopes. The primary drawback of the existing methods used for manufacturing micro-hemispherical resonant gyroscopes based on MEMS technology is the intricate and costly process involved. Here we report the design, fabrication, and characterization of the first 3D-printable micro-hemispherical shell resonator for Coriolis vibrating gyroscope. One remarkable advancement is fabrication in just two steps, rather than the dozen or so steps of traditional micromachining. Utilizing the intricate shaping capability and ultra-high precision offered by projection micro stereolithography, we are able to fabricate 3D high-aspect-ratio resonant structures and controllable capacitive air gaps, both of which are extremely difficult for MEMS technology. In addition, the fabricated resonators can be tuned for resonance frequency by electrostatic forces and exhibit higher quality factor in air compared to MEMS micro-hemispherical resonators. This work demonstrates the feasibility of rapidly batch-manufacturing micro-hemispherical shell resonators, paving the way for the development of micro-hemispherical resonator gyroscopes for portable inertial navigation. Concurrently, this particular design concept could be further applied to increase the uptake in the MEMS community.

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Design and development of a MEMS butterfly resonator using synchronizing beam and out of plane actuation

Cited by 13 publications

References 26 publications

Application of MEMS Accelerometers in Dynamic Vibration Monitoring of a Vehicle

Application of MEMS Accelerometers in Dynamic Vibration Monitoring of a Vehicle

Analytical modeling of an inclined folded-beam spring used in micromechanical resonator devices

A 3D-printed micro-hemispherical shell resonator with electrostatic tuning for Coriolis vibratory gyroscope

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