A new doping method for the vertical sidewall of a trench by electron cyclotron resonance plasma is described. The plasma was produced under a pressure of 5×10−4 Torr. A doped layer was formed uniformly along the sidewall of a trench with subhalf micron width and an aspect ratio of 6.2. By using a de-ionized water cooling system, the wafer temperature was maintained below 120 °C and the boron dopant was introduced without damage to the photoresist.

Helium-like spectra produced by photon emission of ions with intermediate Z represent an important diagnostic for fusion plasmas and solar flares. In this work, the influence of the radiative transitions among doubly excited levels on the intensity of the associated dielectronic satellites (1s 2 nl-1s2lnl ) is analysed. Special attention is paid to the comparison between inner-shell excited satellites of n = 2 and different theoretical calculations. We described the group of n = 3 and n = 4 dielectronic satellites taking into account additional radiative channels to the group of n = 2. Cascade contributions have been verified in experimental spectra of argon from the tokamak TEXTOR. We have compared the intensity of all resolved satellites of n = 2 and the group of n = 3 with experiment. The internal consistency for the satellites with and without innershell excitation part has been achieved. Most important is the effect on the measurement of lithium-like ions, determined from the collisional satellites. The measured concentrations prove the prediction of transport simulation, taking into account the diffusion of ions and charge exchange recombination. The strong satellites of n = 2, providing the results on electron temperature, are found to be not sensitive to the cascades.

Bis [4-(alkyl-and bis[4-(phenyl-mercaptomethyl) imidazole] copper( 11) diperchlorates (alkyl = n-propyl, t-butyl, or benzyl) and 1,6-bis(imidazol-4'-yI) -2,5-dithiahexanecopper(ii) diperchlorate were prepared. The cationic moieties of these complexes undergo electrochemically reversible redox reactions at the potentials €+ = +0.23 to +0.36 V vs. s.c.e. in methanol containing [NBu",J[BF,] (0.1 mol dme3) as a supporting electrolyte. Kinetic studies on the reductions of these complexes with ferrocene in methanol reveal that precursor complexes are formed prior to electron transfer between the reactants; the formation constants of the precursor complexes are in the range 9.7-32.2 dm3 mol-1. The activation entropies for the electron-transfer reaction were obtained as positive values, +33 to +71 J K-l mol-l, which suggests that the precursor complex undergoes desolvation in a transition state. Electronic absorption and e.s.r. spectra of the copper(i1) complexes as well as the X-ray crystal structure of bis[4-(npropylmercaptomethyl)imidazole]copper(~~) diperchlorate are described. The X-ray crystal structure shows the copper to be centrosymmetrically co-ordinated by two thioether sulphur atoms [Cu-S 2.397(2) A], two imidazole nitrogen atoms [Cu-N 1.940( 6) A], and two oxygen atoms from unidentate perchlorate ions [Cu-0 2.594(6) A]. t Supplementary data available (No. SUP 23552, 8 pp.): structure factors, thermal parameters. See Notices to Authors No. 7, J . Chem. Soc., Dalton Trans., 1981, Index issue. Non-S.I. unit employed: G = $ The Cu" complex of cimetidine is only known as such, although the Cu" ion is placed in an octahedral geometry formed by two S and four N atoms as determined by the X-ray analysk8 T.

A novel technique for synthesis of highly porous inorganic SOG films such as aerogels using conventional spin-on processing has been developed. The porous films exhibit dielectric constants as low as 2.3 and the average pore diameter was about 80 nm. The relative dielectric constants of the films compare favorably with those of organic polymers, and the films were demonstrated to exhibit relatively low hygroscopic characteristics. This novel technique for synthesis of porous film is the first step in the development of nanofoam materials for future low k dielectrics.

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