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The e-beam stimulated reaction, CdCl2 (s)→Cd(s)+2 Cl(g), has been studied in cadmium chloride thin films between 303 and 483 K using 2-keV electrons. The dose required to make 90-nm-deep holes at 483 K is 3×10−3 C cm−2. Extrapolated dosing levels of ∼6×10−5 C cm−2 are expected. The use of CdCl2 as a positive-type electron resist in a new scheme is proposed. A working model, useful for considering the e-beam stimulated decomposition energetics and mechanism, is briefly discussed.

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