Cadmium chloride thin films: hydration-dehydration

Articles you may be interested inDependence of the electron irradiation induced decomposition of cadmium chloride thin films on the beam energy dissipation profile Application of a reactiondiffusion model for negative chemically amplified resists to determine electronbeam proximity correction parametersThe radiolysis of vacuum-deposited thin films of cadmium chloride on silicon substrates has been studied in the energy range from 1 to 5 keY. Phase-locked mass spectrometry was used for the in situ monitoring of the evolution of the decomposition products, chlorine and cadmium, as a function of substrate temperature, current density, film thickness, and beam energy, for pure and doped films. Ellipsometric thickness and refractive index measurements, and scanning electron microscope examination of the morphology of irradiated films were carried out. The decomposition kinetics have been analyzed in terms of a model in which a fraction of the radiation-generated electron-hole pairs participate in the thermally activated decomposition reaction sequence at the film surface. A potential lithographic scheme has been established, in which decomposition patterns generated onto the films are transferred onto the Si0 2 underlayer by reactive ion etching, with a resolution approximately equal to the film grain size.4397

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Dependence of the electron irradiation induced decomposition of cadmium chloride thin films on the beam energy dissipation profile

Aidinis¹

1998

Journal of Applied Physics

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The influence of primary beam energy and film thickness on decomposition by uniform electron irradiation of vacuum deposited thin films of cadmium chloride on silicon substrates has been studied for primary beam energies from 1 to 5 keV. Remaining film thickness versus dose measurements, obtained by ellipsometry, are compared to a theoretically derived model. This model is based on a steady state solution of the continuity equation for beam generated excess carriers within the thin film with a carrier generating function proportional to the Gaussian approximation for the rate of energy dissipation versus depth function. The proportionality constant is equal to the energy of formation of an electron–hole pair. The variation of the rate of energy dissipation with depth is derived from Monte Carlo calculations. The principle of scaling is shown to apply when energy loss is normalized with respect to the primary beam energy and depth with respect to the Bethe range. An energy-independent, universal thickness-versus-dose curve is proposed in view of the application of this material as an electron beam resist.

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Cadmium chloride thin films: hydration-dehydration

Cited by 3 publications

References 2 publications

Photochromic CdCl2CuCl coatings obtained by vacuum deposition

Photochromic CdCl2CuCl coatings obtained by vacuum deposition

Electron beam induced decomposition of cadmium chloride thin films with potential resist application

Dependence of the electron irradiation induced decomposition of cadmium chloride thin films on the beam energy dissipation profile

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