Taking advantage of high aspect ratio micro structure technology (HARMST) allows a cost competitive approach to batch fabricate a high number of tool electrodes for micro electro discharge machining (EDM). A new type of EDM tool micro electrode fabrication was developed using a combination of near UV lithography to directly polymerize a micromold made of SU-8 TM in combination with electroplating. Applying SU-8 TM for the fabrication of deep hollow micromolds, an ultra-thin resist film remains on the seed layer at the bottom of the micromolds. This remaining undeveloped resist film at the bottom of the mold prevents the electro deposition on the conductive seed layer. The PVA Tepla PS4008 plasma ashing system was investigated to remove the resist residually from the SU-8 TM micromolds before electroplating without destroying the micromold itself and to remove the entire micromold after the fabrication of the micro electrodes selectively.

A new approach of data recording during manufacturing is to store information directly on machine components. This way, the components may serve as their own information carrier throughout the whole manufacturing process, and later in the working cycle. Such a concept is called “gentelligent” (for genetically intelligent) and aims at allowing to inherit fabrication and application data to the product's next generation. This requires a new kind of machine parts, which are capable for collecting, preprocessing, and storing information (e.g. temperature and forces during use of the component) on their surface. For storing the required information, proven principles of the peripheral magnetic data recording including inductive writing and a magneto‐optical readout are applied. The storage medium used is a material developed recently: “magnetic magnesium”, i.e. magnesium filled with hard magnetic particles. To allow a magneto‐optical readout based on the Magneto‐optical Kerr Effect (MOKE), bulk material is covered with a soft magnetic layer, called a keeper layer. The keeper layer is supplied to generate a homogeneous magnetic and reflective surface which is not provided by pure “magnetic magnesium”. This paper describes the development of the recording system. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

A new approach on tracking components throughout the entire manufacturing processes is to apply magnetic recording technology to storing key production data on the component itself. The system investigated uses "magnetic magnesium", i.e. a magnesium matrix filled with hard magnetic particles. For storing the data, a classic inductive write head, consisting of a soft magnetic ring core with a write gap in the flux path and a coil for creating the magnetic flux is chosen. For an application in a machine environment, readout has to be done at a distance. On approach of such non-contact readout, an advantage of the Magneto-Optical Kerr Effect (MOKE), which senses the direction of magnetization of a reflecting surface, is to be taken. As in the case of data storage, information is encoded in the magnetization pattern of data tracks.

Fabricating electrodes for Micro Sinking Electro Discharge Machining (Micro-SEDM) using thin-film technology is an attractive alternative to conventional processes. A lithography process taking advantage of a positive photoresist to create a micro mold for electroplating was optimized to reach a thickness in the order of 200 µm at a maximal structure aspect ratio of 10 (structure diameter 20 µm). The resist stability during the electroplating process was investigated. Sample micro Cu electrodes with a length of 167 µm could be deposited in micro mold with a maximal aspect ratio of 8. The paper provides simulation results for Cu and W micro electrodes, a fabrication process for the microelectrode mentioned above, as well as experimental investigations regarding their usage in a Micro-SEDM process.

A simple approach for accomplishing soft thin film magnetic measurements is evaluated. A modular system based on a pair of HELMHOLTZ coils taken from an existing magnetometer was designed. To characterize it, a quantitative comparison between analytic calculations, Finite Element Methode (FEM) simulation and measurements was conducted. The field uniformity over the measured area of 10 cm along the x-axis was found to be within1.6% of toleration; a sampling rate of 50 kSPS and 50 Hz external magnetic field excitation frequency were used. The system setup and analysis methods were analyzed. The system shows high correlations to other magnetometers, that allows easy calibration with commercial HALL sensors and other magnetometers. The measurement of electroplated NiFe samples fabricated in thin-film technology at the imt demonstrated the validity of the approach.