We describe the design and development of a compact low temperature XY stage scanning tunneling microscope dedicated to operation at low temperatures, in high magnetic fields, and in an ultrahigh vacuum environment. The system features a homemade compact scanning tunneling microscope ͑STM͒ head coupled to an inertially driven horizontal slider which allows a two-dimensional coarse positioning of the tip over 6 ϫ 3 mm 2 with submicronic resolution. We also describe the geometry used to avoid coupling between the three-dimensional coarse and fine movements. To demonstrate the mechanical stability of the STM we display atomic resolution and large scale imaging. We illustrate the capabilities of our system by performing scanning tunneling spectroscopy on PbMo 6 S 8 microcrystals.

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Among the technological developments pushed by the emergence of 3D Stacked IC technologies, temporary wafer bonding and thinning have become key elements in device processing over the past years. While these elements are now mature enough for high-volume manufacturing, thin wafer debonding and handling still remain challenging. Hence this work focuses on a novel ZoneBOND approach to face these challenges.

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