Scanning Thermal Microscopy (SThM) uses micromachined thermal sensors integrated in a force sensing cantilever with a nanoscale tip can be highly useful for exploration of thermal management of nanoscale semiconductor devices. As well as mapping of surface and subsurface properties of related materials. Whereas SThM is capable to image externally generated heat with nanoscale resolution, its ability to map and measure thermal conductivity of materials has been mainly limited to polymers or similar materials possessing low thermal conductivity in the range from 0.1 to 1 Wm -1 K -1 , with lateral resolution on the order of 1 µm.In this paper we use linked experimental and theoretical approaches to analyse thermal performance and sensitivity of the micromachined SThM probes in order to expand their applicability to a broader range of nanostructures from polymers to semiconductors and metals. We develop physical models of interlinked thermal and electrical phenomena in these probes and their interaction with the sample on the mesoscopic length scale of few tens of nm and then validate these models using experimental measurements of the real probes, which provided the basis for analysing SThM performance in exploration of nanostructures. Our study then highlights critical features of these probes, namely, the geometrical location of the thermal sensor with respect to the probe apex, thermal conductance of the probe to the support base, heat conduction to the surrounding gas, and the thermal conductivity of tip material adjacent to the apex. It is furthermore allows us to propose a novel design of the SThM probe that incorporates a multiwall carbon nanotube (CNT) or similar high thermal conductivity graphene sheet material with longitudinal dimensions on micrometre length scale positioned near the probe apex that can provide contact areas with the sample on the order of few tens of nm. The new sensor is predicted to provide greatly improved spatial resolution to thermal properties of nanostructures, as well as to expand the sensitivity of the SThM probe to materials with heat conductivity values up to 100-1000 Wm -1 K -1 .
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We propose a scheme for coupling 2D materials to an engineered cavity based on a defective rod type photonic crystal lattice. We show results from numerical modelling of the suggested cavity design, and propose using the height profile of a 2D material transferred on top of the cavity to maximise coupling between exciton recombination and the cavity mode. The photonic structure plays a key role in enhancing the launch efficiency, by improving the directionality of the emitted light to better couple it into an external optical system. When using the photonic structure, we measured an increase in the extraction ratio by a factor of 3.4. We investigated the variations in the flux spectrum when the radius of the rods is modified, and when the 2D material droops to a range of different heights within the cavity. We found an optimum enhancement when the rods have a radius equal to 0.165 times the lattice constant, this enhancement reduces when the radius is reduced or increased. Finally, we discuss the possible use of solid immersion lenses, in combination with our photonic structure, to further enhance the launch efficiency and to improve vertical confinement of the cavity mode.
Use of high frequency (HF) vibrations at MHz frequencies in Atomic Force Microscopy (AFM) advanced nanoscale property mapping to video rates, allowed use of cantilever dynamics for mapping nanomechanical properties of stiff materials, sensing μs time scale phenomena in nanostructures, and enabled detection of subsurface features with nanoscale resolution. All of these methods critically depend on the generally poor characterized HF behaviour of AFM cantilevers in contact with a studied sample, spatial and frequency response of piezotransducers, and transfer of ultrasonic vibrations between the probe and a specimen. Focusing particularly on Ultrasonic Force Microscopy (UFM), this work is also applicable to waveguide UFM, heterodyne force microscopy, and near-field holographic microscopy, all methods that exploit nonlinear tip-surface force interactions at high frequencies. Leveraging automated multidimensional measurements, spectroscopic UFM (sUFM) is introduced to investigate a range of common experimental parameters, including piezotransducer excitation frequency, probed position, ultrasonic amplitude, cantilever geometry, spring constant, and normal force. Consistent with studies of influence of each of these factors, the data-rich sUFM signatures allow efficient optimization of ultrasonic-AFM based measurements, leading to best practices recommendations of using longer cantilevers with lower fundamental resonance, while at the same time increasing the central frequency of HF piezo-actuators, and only comparing results within areas on the order of few μm2 unless calibrated directly or compared with in-the-imaged area standards. Diverse materials such as Si, Cr, and photoresist are specifically investigated. This work thereby provides essential insight into the reliable use of MHz vibrations with AFM and provides direct evidence substantiating phenomena such as sensitivity to adhesion, diminished friction for certain ultrasonic conditions, and the particular benefit of UFM and related methods for nanoscale mapping of stiff materials.
Nanoscale heat transport is of increasing importance as it often defines performance of modern processors and thermoelectric nanomaterials, and affects functioning of chemical sensors and biosensors. Scanning thermal microscopy (SThM) is the leading tool for nanoscale mapping of thermal properties, but it is often negatively affected by unstable tip-surface thermal contacts. While operating SThM in-liquid environment may allow unimpeded thermal contact and open new application areas, it has so far been regarded as impossible due to increased heat dissipation into the liquid, and the perceived reduced spatial thermal resolution. Nevertheless, in this paper we show that such liquid immersion SThM (iSThM) is fully feasible and, while its thermal sensitivity and spatial resolution is somewhat below that of in-air SThM, it has sufficient thermal contrast to detect thermal conductivity variations in few tens of nm thick graphite nanoflake and metal-polymer nanostructured interconnects. Our results confirm that thermal sensing in iSThM can provide nanoscale resolution on the order of 30 nm, that, coupled with the absence of tip snap-in due to the elimination of capillary forces, opens the possibility for nanoscale thermal mapping in liquids, including thermal phenomena in energy storage devices, catalysts and biosystems.
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