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Direct current glow discharges have been operated in atmospheric air by using 100 μm microhollow cathode discharges as plasma cathodes. The glow discharges were operated at currents of up to 22 mA, corresponding to current densities of 3.8 A/cm2 and at average electric fields of 1.2 kV/cm. Electron densities in the glow are in the range from 1012 to 1013 cm−3. Varying the current of the microhollow cathode discharge allows us to control the current in the atmospheric pressure glow discharge. Large volume atmospheric pressure air plasmas can be generated by operating microhollow cathode discharges in parallel.

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Stabilization and control of a high-pressure glow discharge by means of a microhollow cathode discharge has been demonstrated. The microhollow cathode discharge, which is sustained between two closely spaced electrodes with openings of approximately 100 m diam, serves as plasma cathode for the high-pressure glow. Small variations in the microhollow cathode discharge voltage generate large variations in the microhollow cathode discharge current and consequently in the glow discharge current. In this mode of operation the electrical characteristic of this system of coupled discharges resembles that of a vacuum triode. Using the microhollow cathode discharge as plasma cathode it was possible to generate stable, direct current discharges in argon up to atmospheric pressure, with estimated electron densities in the range from 10 11 to 10 12 cm Ϫ3 . The recently demonstrated parallel operation of these discharges indicates the potential of this technique for the generation of large volume plasmas at high gas pressure through superposition of individual glow discharges.

Microhollow cathode discharges are high-pressure, nonequilibrium gas discharges between a hollow cathode and a planar or hollow anode with electrode dimensions in the 100 μm range. The large concentration of high-energy electrons, in combination with the high-gas density favors excimer formation. Excimer emission was observed in xenon and argon, at wavelengths of 128 and 172 nm, respectively, and in argon fluoride and xenon chloride, at 193 and 308 nm. The radiant emittance of the excimer radiation was found to increase monotonically with pressure. However, due to the decrease in source size with pressure, the efficiency (ratio of excimer radiant power to input electrical power), has for xenon and argon fluoride a maximum at ∼400 Torr. The maximum efficiency is between 6% and 9% for xenon, and ∼2% for argon fluoride.