We have developed a gas sensor for hydrocarbons using layered structures hydrocarbons /porous silicon. Sensitivity of this device, response time and capacitance response to different gases (ethane, ethylene and propane) have been studied. DC and AC electrical measurements were performed to test the sensor and it has been shown that CH x layer-PS/p-Si structure is modified by the gas reactivity on the PS/CHx surface. Finally, FTIR spectroscopy measurements in different gas environments have shown remarkable change of chemical composition of the sensor material as a result of its interaction with gases.
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