The elongation of spherical Au nanoparticles embedded in [Formula: see text] under swift heavy ion (SHI) irradiation is an extensively studied phenomenon. The use of a TEM grid as a substrate facilitates the identification of the same nanoparticle before and after the irradiation. Since the underdensification of [Formula: see text] inside the ion track plays a key role, the elongation is sensitive to the matrix material properties. Therefore, we studied the elongation process of SHI irradiated Au spherical nanoparticles of various diameters (5–80 nm) embedded either in atomic layer deposition (ALD) or plasma-enhanced chemical vapor deposition (PECVD) [Formula: see text]. The results show that a different elongation ratio is achieved depending on the particle initial size, ion fluence, and a different [Formula: see text] deposition method. The embedded nanoparticles in ALD [Formula: see text] elongate roughly 100% more than the nanoparticles embedded in PECVD [Formula: see text] at the biggest applied fluence ([Formula: see text]). On the other hand, at fluences lower than [Formula: see text], nanoparticles elongate slightly more when they are embedded in PECVD [Formula: see text].

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Zinc oxide (ZnO) thin films were grown by atomic layer deposition using diethylzinc (DEZ) and water. In addition to depositions with normal water, heavy water (2H2O) was used in order to study the reaction mechanisms and the hydrogen incorporation at different deposition temperatures from 30 to 200 °C. The total hydrogen concentration in the films was found to increase as the deposition temperature decreased. When the deposition temperature decreased close to room temperature, the main source of impurity in hydrogen changed from 1H to 2H. A sufficiently long purging time changed the main hydrogen isotope incorporated in the film back to 1H. A multiple short pulse scheme was used to study the transient steric hindrance. In addition, the effect of the storage of the samples in ambient conditions was studied. During the storage, the deuterium concentration decreased while the hydrogen concentration increased an equal amount, indicating that there was an isotope exchange reaction with ambient H2 and/or H2O.

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