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The aim of this paper is to investigate experimentally the performances of three photolithographic processes, the monolayer, AQUATAR® and BARLi® processes, for 0.35 jim patterning using the Exposure-Defocus (E-D) Tree technique ('). Parameters of practical importance are considered such as exposure latitude and depth of focus for dense and isolated features, and their overlapping latitudes, i.e. the proximity effect.The influence of the resist thickness (minimum and maximum incoupling thicknesses) and the impact of a 50 rtn sizing of the mask have also been evaluated.Using the BARLi® process, significant improvements have been demonstrated for proximity and CD swing effects. The results highlight the problems of pushing i-line lithography to the 0.35 jim regime and demonstrate that, to achieve acceptable CD control, a BAR process must be used.

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BACKGROUND: Pressure injuries (PIs) are a significant problem for health care institutions. PURPOSE: A retrospective study of patient data was conducted at a semi-urban state hospital in France, aiming to evaluate the rate of PIs and variables that may influence PI prevalence and care at 2 different time points. METHODS: Patient demographic, clinical, PI and PI prevention, and care variables were retrieved from the charts of all patients on all wards (except pediatrics and obstetrics) on October 20, 2009, and on October 24, 2013—4 years apart. Qualitative data were compared between the 2 dates using a t-test for independent variables. The remaining variables were compared using Pearson’s chi-square method. P < .05 was considered significant. RESULTS: No significant differences were noted in PI rates (19% for 2009 and 16% for 2013) or the timing of their occurrence (51% occurred following admission in 2009, and 58.3% occurred after admission in 2013). Significant differences were found with regard to patient age (average, 73.97 and 76.22 years old in 2009 and 2013, respectively; P = .014) and rates of serious injuries (27% and 43% were stages 3 and 4 in 2009 and 2013, respectively; P = .010). Compared with 2009, in 2013, significantly more patients were placed on a specialty mattress and provided nutritional supplements and fewer were provided percutaneous endoscopic gastrostomy or nasogastric tubes. CONCLUSION: The rate of PIs was not different between these 2 time points despite improvements in the use of preventive and therapeutic measures, perhaps due to the increased age and frailty of the patient population in 2013 compared with 2009. Additional prospective research across multiple health care entities is warranted.