Abstract-Using calibrated simulations, we report a detailed study of the doping-less tunnel field effect transistor (TFET) on a thin intrinsic silicon film using charge plasma concept. Without the need for any doping, the source and drain regions are formed using the charge plasma concept by choosing appropriate work functions for the source and drain metal electrodes. Our results show that the performance of the doping-less TFET is similar to that of a corresponding doped TFET. The doping-less TFET is expected to be free from problems associated with random dopant fluctuations. Further, fabrication of doping-less TFET does not require high-temperature doping/annealing processes and therefore, cuts down the thermal budget opening up the possibilities for fabricating TFETs on single crystal silicon-onglass substrates formed by wafer scale epitaxial transfer.

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