The integration of high uniformity, conformal and compact transparent conductive layers into next generation indium tin oxide (ITO)-free optoelectronics, including wearable and bendable structures, is a huge challenge. In this study, we demonstrate the transparent and conductive functionality of aluminum-doped zinc oxide (AZO) thin films deposited on glass as well as on polyethylene terephthalate (PET) flexible substrates by using an atomic layer deposition (ALD) technique. AZO thin films possess high optical transmittance at visible and near-infrared spectral range and electrical properties competitive to commercial ITO layers. AZO layers deposited on flexible PET substrates demonstrate stable sheet resistance over 1000 bending cycles. Based on the performed optical and electrical characterizations, several applications of ALD AZO as transparent conductive layers are shown—AZO/glass-supported liquid crystal (LC) display and AZO/PET-based flexible polymer-dispersed liquid crystal (PDLC) devices.

We demonstrate graphene on flexible, low-loss, cyclo-olefin polymer films as transparent electrodes for terahertz electro-optic devices and applications. Graphene was grown by chemical vapor deposition and transferred to cyclo-olefin polymer substrates by the thermal release tape method as layers on an approximate area of 4 cm 2 . The structural and electromagnetic properties of the graphene samples as well as their spatial variation were systematically mapped by means of µRaman, terahertz time-domain and mid-infrared spectroscopy. Thanks to the small thickness and very low intrinsic absorption of the employed substrates, both high transmittance and conductivity were recorded, demonstrating the suitability of the technique for the fabrication of a new class of transparent and flexible electrodes working in the terahertz spectrum.

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