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By using all-single-wafer processing in the 300-mm quick turn-around time production system, we have shortened cycle time to one-half or less than that of mixed-batch processing. We have also developed a high-speed automated material handling systems (AMHS) for achieving short cycle time. An intrabay rail-guided vehicle developed for the 300-mm fab is a component of this system. This paper describes the new system concepts, including AMHS hardware improvement, operation methods, and technician skill enhancement. We achieved a transfer time of one third or less that of previous fabs.

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T a k a o M i y a z a k i , M a s a h i k o O g i r i m a , T a k a h i r o O k a b e a n d M i n o r u N a g a t a C e n t r a l R e s e a r c h L a b o r a t o r y , H i t a c h i L t d . ,