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Blurs, swelling properties and lithographic performance for polymer bound PAG and polymer PAG blended type resists were studied. A Blur strongly depends on PAG size and the polymer bound PAG type resist reduces the Blur. The Blur for the polymer bound PAG type resist is smaller than that for ZEP (non CAR). The fact indicates that polymer bound PAG should reduce secondary electron diffusion. The polymer bound PAG type resist acquires very small Blur with higher sensitivity and suppresses swelling very well, therefore polymer bound PAG is one of the promising technologies that improve resolution, LWR and sensitivity (RLS) property. RLS property on EUV exposure tool is significantly improved by using the polymer bound PAG type resist. Resolution reaches 24 nmhp and is limited by pattern collapse and line breaking. Further lithographic experiments on EB exposure tool which has higher NILS than EUV exposure tool are carried out in order to make clear relation between Blur and resolution. The resolution of the polymer bound PAG type resist reaches 17.5 nmhp with 35 nm thickness and there is possibility that the resolution of an optimized polymer bound PAG type resist reaches under 15 nmhp. The resolution of the resist with lower capillary force (C.F.) given and lower swelling and on higher NILS exposure tool strongly depends on the Blur.

A high-throughput high-sensitivity optical technique for measuring magnetostriction of thin-film composition-spread samples has been developed. It determines the magnetostriction by measuring the induced deflection of micromachined cantilever unimorph samples. Magnetostriction measurements have been performed on as-deposited Fe-Ga and Fe-Ga-Al thin-film composition spreads. The thin-film Fe-Ga spreads display a similar compositional variation of magnetostriction as bulk. A previously undiscovered peak in magnetostriction at low Ga content was also observed and attributed to a maximum in the magnetocrystalline anisotropy. Magnetostrictive mapping of the Fe-Ga-Al ternary system reveals the possibility of substituting up to 8 at. % Al in Fe 70 Ga 30 without significant degradation of magnetostriction.

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