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Composite Pb(Zr,Ti)O 3 (PZT)/alumina nanostructures are fabricated using 2-dimensional porous alumina as a template. Details of pores filling as well as of crystallization are studied by atomic force microscopy and transmission electron microscopy. The presence of a ferroelectric phase is confirmed by optical second harmonic generation experiments.

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Abstract. The properties, as well as some issues of microelectronic applications of organically modified silicate (ORMOSIL) films, prepared by cohydrolysis in various proportions of tetraethoxysilane (TEOS) and phenyltriethoxysilane (PTEOS), or diphenyldiethylhexyloxydiethoxydisiloxane (DPS) 1, are discussed. Keywords:organically modified silicates, thin film, refractive index, electrical properties Solution Preparation and Film Formation ProcessThe initial solutions were prepared by dissolving TEOS in n-butanol in the presence of some water and HC1. The equivalent SiO content was 6 wt.% and the molar ratio of components was The films were prepared by spinning on silicon wafers with a following bake at 150~ during 3 min (hot plate) and a final anneal at Ta = 200, 450 or 600~ during 20 min. Multiple application with the intermediate bake was used for thicker film preparation; (two-fold coatings were used for electrical measurements, and three-fold ones for IR spectra). Aluminum electrodes were formed by lithography process, for electrical measurements. IR SpectraIIR spectra of the films were measured with a PerkinElmer 1720 spectrometer in the range from 4000 to 400 cm -1 . IR spectra of the silicate films are typical of silicate materials prepared by sol-gel techniques and show the presence of hydroxyl groups. Modification of silicate with organic leads to the production of typical phenyl infrared bands, the magnitudes of which increase with increasing organic content (see Fig. 1). The IR spectra of the films prepared from PTEOS and C2H5

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