SnO2–ZnO thin films consisting of nanoscale crystallites were obtained on glass and silicon substrates by solid-phase low-temperature pyrolysis. The synthesized materials were studied by XRD and SEM methods, electrophysical and optical properties were evaluated, as well as the band gap was calculated. It was shown that regardless of the phase composition all films were optically transparent in the visible range (310–1000 nm). The nanocrystallites’ minimum size, the highest activation energy of the conductivity and the smallest band gap calculated for indirect transitions were shown for a thin film 50SnO2–50ZnO. It was assumed that the band gap decreasing might be attributed to the existence of surface electric fields with a strength higher than 4 × 105 V/cm.

Thin nanocomposite films composed of ZnO and SnO2 at 0.5–5 mol.% concentrations were synthesized by a new solid-phase low-temperature pyrolysis under the developed protocols. This hetero-oxide material was thoroughly studied by X-ray diffraction analysis (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) techniques to be compared with electrical and gas-sensing properties. We have found that the films have a poly-nanocrystal structure of ZnO and SnO2 crystals with characteristic grain sizes at 10–15 nm range. When comparing the chemiresistive response of the films with varied tin dioxide content, the sample of Sn:Zn optimum ratio taken as 1:99 yields 1.5-fold improvement upon to 5–50 ppm NO2 exposure at 200 °C. We argue that these remarkable changes have matured from both a reducing the intergrain potential barrier down to 0.58 eV and increasing the concentration of anionic vacancies at this rational composite. The results demonstrate that solid-phase low-temperature pyrolysis is a powerful technique for adjusting the functional gas-sensing properties of hetero-oxide film via modifying the ratio of the oxide components.

Gas sensors based on the multi-sensor platform MSP 632, with thin nanocomposite films based on tin dioxide with a low content of zinc oxide (0.5–5 mol.%), were synthesized using a solid-phase low-temperature pyrolysis technique. The resulting gas-sensitive ZnO-SnO2 films were comprehensively studied by atomic force microscopy, Kelvin probe force microscopy, X-ray diffraction, scanning electron microscopy, transmission electron microscopy, scanning transmission electron microscopy, energy dispersive X-ray spectrometry, and X-ray photoelectron spectroscopy. The obtained films are up to 200 nm thick and consist of ZnO-SnO2 nanocomposites, with ZnO and SnO2 crystallite sizes of 4–30 nm. Measurements of ZnO-SnO2 films containing 0.5 mol.% ZnO showed the existence of large values of surface potential, up to 1800 mV, leading to the formation of a strong surface electric field with a strength of up to 2 × 107 V/cm. The presence of a strong surface electric field leads to the best gas-sensitive properties: the sensor’s responsivity is between two and nine times higher than that of sensors based on ZnO-SnO2 films of other compositions. A study of characteristics sensitive to NO2 (0.1–50 ppm) showed that gas sensors based on the ZnO-SnO2 film demonstrated a high sensitivity to NO2 with a concentration of 0.1 ppm at an operating temperature of 200 °C.

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To obtain high-quality nanocrystalline transparent ZnO films, a new pyrolysis synthesis method was used. The resulting material was investigated by x-ray diffraction, scanning electron microscopy. Structural analysis of the films shows that they are polycrystalline and have a wurtzite structure. The film structure consists of nanocrystallites about 10–20 nm in size, uniformly distributed over the surface of the substrate and over the thickness of the film. The temperature dependence of the resistance of the obtained films was also investigated. The activation energies of conductivity are determined by the donor conductivity levels existing in zinc oxide, and temperature hysteresis is determined by the effect of charging oxygen adsorbed on the surface of zinc oxide.