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Advanced electro-magnetic machines and systems require new materials with improved properties. Heterogeneous 3D nanomodified soft magnetic materials could be efficiently applied. Multistage technology of iron particle surface nanomodification by sequential oxidation and Si-organic coatings will be reported. The thickness of layers is 0.5-5 nm. Compaction and annealing are the final steps of magnetic parts and components shaping. The soft magnetic composite material shows the features: resistivity is controlled by insulating coating thickness and equals up to ρ =10-4 Ω⋅m for metallic state and ρ =104 Ω⋅m for insulator state, maximum magnetic permeability is μm = 2500 and μm = 300 respectively, induction is up to Bm=2.1 T. These properties of composite soft magnetic material allow applying for transformers, throttles, stator-rotor of high-efficient and powerful electric machines in 10 kHz–1MGz frequency range. For microsystems and microcomponents application, good opportunity to improve their reliability is the use of nanocomposite materials. Electroplating technology of nanocomposite magnetic materials into the ultra-thick micromolds will be presented. Co-deposition of the soft magnetic alloys with inert hard nanoparticles allows obtaining materials with magnetic permeability up to μm=104, magnetic induction of Bs=(0.62–1.3) T. Such LIGA-like technology will be applied in MEMS to produce high reliable devices with advanced physical properties.

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