Polymerizates of imidazole and epichlorohydrin (Imep) serve as one of the benchmarks for today's chemistry development of leveler additives in context of the industrial copper Damascene process. We therefore studied the synergistic and antagonistic interplay of the Imep polymer with other additives, commonly present in copper plating baths used for the state-of-the-art IC manufacturing. Characteristic oscillations in the applied electrode potential appear in galvanostatic copper electrodeposition when Imep is used in combination with SPS (bis­(sodium sulfopropyl) disulfide). We identified the reversible Cu­(I) coordination chemistry of the Imep polymer as a second prospective driving force beyond interfacial anion/cation pairing toward the formation of such suppressor/leveler ensembles at the interface. OH groups of the pristine Imep polymer coordinate with H2O-Cu­(I)-MPS units (primary effect) that appear as side products of the copper electrodeposition in the presence of SPS. The latter transforms during copper deposition into monomeric MPS (mercaptopropanesulfonic acid/sulfonate) as result of the adsorptive SPS dissociation on the copper surface. Electrostatic coupling between the anionic sulfonate of the MPS and the cationic imidazolium group in the formed linear, bidentate Imep-Cu­(I)-MPS complex results into a neutral, hydrophobic species that finally precipitates (secondary effect). The presence of diamagnetic Cu­(I) species in those precipitates is proven by elementary analysis in combination with magnetic SQUID measurements. The observed potential oscillations under galvanostatic conditions are discussed in terms of an alternating precipitation and dissolution of the Imep-Cu­(I)-MPS suppressor ensemble at the copper/electrolyte interface. Linear sweep experiments prove a partially hidden, N-shaped negative differential resistance (HN-NDR) as physical origin for the observed instabilities under galvanostatic conditions. SIMS (secondary ion mass spectroscopy) depth profiling of copper films deposited under such oscillatory conditions reveals periodic modulations in the contamination level parallel to the surface normal. Cross-sectional FIB analysis of the grown copper deposit reveals periodically repeating lines of grain boundaries in the copper deposit.

High-resolution chemical depth profiling measurements of copper films are presented. The 10 μm thick copper test samples were electrodeposited on a Si-supported Cu seed under galvanostatic conditions in the presence of particular plating additives (SPS, Imep, PEI, and PAG) used in the semiconductor industry for the on-chip metallization of interconnects. To probe the trend of these plating additives toward inclusion into the deposit upon growth, quantitative elemental mass spectrometric measurements at trace level concentration were conducted by using a sensitive miniature laser ablation ionization mass spectrometer (LIMS), originally designed and developed for in situ space exploration. An ultrashort pulsed laser system (τ ∼ 190 fs, λ = 775 nm) was used for ablation and ionization of sample material. We show that with our LIMS system, quantitative chemical mass spectrometric analysis with an ablation rate at the subnanometer level per single laser shot can be conducted. The measurement capabilities of our instrument, including the high vertical depth resolution coupled with high detection sensitivity of ∼10 ppb, high dynamic range ≥10(8), measurement accuracy and precision, is of considerable interest in various fields of application, where investigations with high lateral and vertical resolution of the chemical composition of solid materials are required, these include, e.g., wafers from semiconductor industry or studies on space weathered samples in space research.

The recognition of biosignatures on planetary bodies requires the analysis of the putative microfossil with a set of complementary analytical techniques. This includes localized elemental and isotopic analysis of both, the putative microfossil and its surrounding host matrix. If the analysis can be performed with spatial resolution at the micrometer level and ppm detection sensitivities, valuable information on the (bio)chemical and physical processes that influenced the sample material can be gained. Our miniaturized laser ablation ionization mass spectrometry (LIMS)-time-of-flight mass spectrometer instrument is a valid candidate for performing the required chemical analysis in situ. However, up until now it was limited by the spatial accuracy of the sampling. In this contribution, we introduce a newly developed microscope system with micrometer accuracy for Ultra High Vacuum application, which allows a significant increase in the measurement capabilities of our miniature LIMS system. The new enhancement allows identification and efficient and accurate sampling of features of micrometer-sized fossils in a host matrix. The performance of our system is demonstrated by the identification and chemical analysis of signatures of micrometer-sized fossil structures in the 1.9 billion-year-old Gunflint chert.

Performance studies of a microscope‐camera system (MCS) and a laser ablation/ionisation mass spectrometer (LIMS) instrument (referred to here as a laser mass spectrometer or LMS) are presented. These two instruments were designed independently for in situ analysis of solids on planetary surfaces and will be combined to a single miniature instrument suite for in situ chemical and morphological analysis of surface materials on planetary bodies. LMS can perform sensitive chemical (elemental, isotope and molecular) analyses with spatial resolution close to micrometre‐sized grains. It allows for studies with mass resolution (M/ΔM) up to 800 in ablation mode (elemental composition) and up to 1500 in desorption mode (molecular analysis). With an effective dynamic range of at least eight orders of magnitude, sensitive and quantitative measurements can be conducted of almost all elements and isotopes with a concentration larger than a few ppb atoms. Hence, in addition to the major element composition, which is important for the determination of mineralogical constituents of surface materials, trace elements can also be measured to provide information on mineral formation processes. Highly accurate isotope ratio measurements can be used to determine in situ geochronology of sample material and for investigations of various isotope fractionation processes. MCS can conduct optical imagery of mm‐sized objects at several wavelengths with micrometre spatial resolution for the characterisation of morphological surface details and to provide insight into surface mineralogy. Furthermore, MCS can help in the selection of sample surface areas for further mass spectrometric analysis of the chemical composition. Surface auto‐fluorescence measurements and images in polarised light are additional capabilities of the MCS, to identify either fluorescing minerals or organic materials, if present on the analysed surface, for further investigation by LMS. The results obtained by investigations of NIST reference materials, amino acid films and a natural graphite sample embedded in silicate rock are presented to illustrate the performance of the instruments and their potential to deliver chemical information for mineral and organic phases in their geological context.

For the last four decades space exploration missions have searched for molecular life on planetary surfaces beyond Earth. Often pyrolysis gas chromatography mass spectrometry has been used as payload on such space exploration missions. These instruments have relatively low detection sensitivity and their measurements are often undermined by the presence of chloride salts and minerals. Currently, ocean worlds in the outer Solar System, such as the icy moons Europa and Enceladus, represent potentially habitable environments and are therefore prime targets for the search for biosignatures. For future space exploration missions, novel measurement concepts, capable of detecting low concentrations of biomolecules with significantly improved sensitivity and specificity are required. Here we report on a novel analytical technique for the detection of extremely low concentrations of amino acids using ORIGIN, a compact and lightweight laser desorption ionization – mass spectrometer designed and developed for in situ space exploration missions. The identified unique mass fragmentation patterns of amino acids coupled to a multi-position laser scan, allows for a robust identification and quantification of amino acids. With a detection limit of a few fmol mm−2, and the possibility for sub-fmol detection sensitivity, this measurement technique excels current space exploration systems by three orders of magnitude. Moreover, our detection method is not affected by chemical alterations through surface minerals and/or salts, such as NaCl that is expected to be present at the percent level on ocean worlds. Our results demonstrate that ORIGIN is a promising instrument for the detection of signatures of life and ready for upcoming space missions, such as the Europa Lander.