The need for low-cost microfabrication technologies in modern life-sciences is described. The article compares the replication technologies, hot embossing and micro-injection moulding and gives an overview over the technologies used for fabrication of the replication masters. The back-end processes transforming the replicated plastic part into a complete microsystem are described. Some manufacturing issues of mass production are discussed.

Erratum: "Suppressed diffusion of boron and carbon in carbon-rich silicon" [Appl.

We present results on deconvolution of molecular beam epitaxy (MBEkgrown boron profiles in Si and SiGe that are of crucial importance for Si/SiGe heterojunction bipolar transistors (HBTs). They are based on the assump tions of linearity and homogeneity of the measurement. We determine experimentally the physical limits of these assumptions by investigating sequences of boron spikes in Si and SiGe. The deconvolution is performed by Fourier transformation into the k-domain, preceded by a physically motivated least-squares fitting of the measurement data. In this way, the high-frequency noise contributions are eliminated to a great extent without producing a systematic broadening. The numerical evaluation of the SIMS profiles is extremely fast in comparison to forward techniques and the numerical error is shown to be small. We discuss the deconvoluted SIMS profiles of MBEgrown boron spikes in Si and SiGe after annealing. Our method is suited to give information about the dopant outdiffusion from th SiGe layer in the case of HBTs.

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